A computational workflow, also known as workflow, consists of tasks that must be executed in a specific order to attain a specific goal. Often, in fields such as biology, chemistry, physics, and data science, among others, these workflows are complex and are executed in large-scale, distributed, and heterogeneous computing environments prone to failures and performance degradation. Therefore, anomaly detection for workflows is an important paradigm that aims to identify unexpected behavior or errors in workflow execution. This crucial task to improve the reliability of workflow executions can be further assisted by machine learning-based techniques. However, such application is limited, in large part, due to the lack of open datasets and benchmarking. To address this gap, we make the following contributions in this paper: (1) we systematically inject anomalies and collect raw execution logs from workflows executing on distributed infrastructures; (2) we summarize the statistics of new datasets, and provide insightful analyses; (3) we convert workflows into tabular, graph and text data, and benchmark with supervised and unsupervised anomaly detection techniques correspondingly. The presented dataset and benchmarks allow examining the effectiveness and efficiency of scientific computational workflows and identifying potential research opportunities for improvement and generalization. The dataset and benchmark code are publicly available \url{https://poseidon-workflows.github.io/FlowBench/} under the MIT License.
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