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2102.03540
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Practical Fractional-Order Variable-Gain Super-Twisting Control with Application to Wafer Stages of Photolithography Systems
IEEE/ASME transactions on mechatronics (IEEE/ASME Trans. Mechatronics), 2021
6 February 2021
Zhian Kuang
Liting Sun
Huijun Gao
Masayoshi Tomizuka
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Papers citing
"Practical Fractional-Order Variable-Gain Super-Twisting Control with Application to Wafer Stages of Photolithography Systems"
1 / 1 papers shown
On the Guaranteed Almost Equivalence between Imitation Learning from Observation and Demonstration
IEEE Transactions on Neural Networks and Learning Systems (IEEE TNNLS), 2020
Zhihao Cheng
Liu Liu
Aishan Liu
Hao Sun
Meng Fang
Dacheng Tao
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16 Oct 2020
1
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