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Generic Lithography Modeling with Dual-band Optics-Inspired Neural
  Networks

Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks

Design Automation Conference (DAC), 2022
12 March 2022
Haoyu Yang
Zong-Yi Li
K. Sastry
S. Mukhopadhyay
M. Kilgard
Anima Anandkumar
Brucek Khailany
Vivek Singh
Haoxing Ren
ArXiv (abs)PDFHTML

Papers citing "Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks"

11 / 11 papers shown
ILILT: Implicit Learning of Inverse Lithography Technologies
ILILT: Implicit Learning of Inverse Lithography TechnologiesInternational Conference on Machine Learning (ICML), 2024
Haoyu Yang
Haoxing Ren
200
7
0
06 May 2024
Optimizing Predictive AI in Physical Design Flows with Mini Pixel Batch
  Gradient Descent
Optimizing Predictive AI in Physical Design Flows with Mini Pixel Batch Gradient Descent
Haoyu Yang
Anthony Agnesina
Haoxing Ren
106
3
0
08 Feb 2024
Neural Lithography: Close the Design-to-Manufacturing Gap in
  Computational Optics with a 'Real2Sim' Learned Photolithography Simulator
Neural Lithography: Close the Design-to-Manufacturing Gap in Computational Optics with a 'Real2Sim' Learned Photolithography Simulator
Emily Black
Guangyuan Zhao
Daniel E. Ho
AI4CE
200
1
0
29 Sep 2023
Neural Operators for Accelerating Scientific Simulations and Design
Neural Operators for Accelerating Scientific Simulations and DesignNature Reviews Physics (Nat. Rev. Phys.), 2023
Kamyar Azzizadenesheli
Nikola B. Kovachki
Zong-Yi Li
Miguel Liu-Schiaffini
Jean Kossaifi
Anima Anandkumar
AI4CE
657
271
0
27 Sep 2023
Inverse Lithography Physics-informed Deep Neural Level Set for Mask
  Optimization
Inverse Lithography Physics-informed Deep Neural Level Set for Mask OptimizationApplied Optics (Appl. Opt.), 2023
Xingchen Ma
Shaogang Hao
AI4CE
61
5
0
15 Aug 2023
Reinforcement Learning for Photonic Component Design
Reinforcement Learning for Photonic Component DesignAPL Photonics (APL Photonics), 2023
Donald Witt
Jeff Young
L. Chrostowski
176
14
0
14 Jul 2023
DevelSet: Deep Neural Level Set for Instant Mask Optimization
DevelSet: Deep Neural Level Set for Instant Mask OptimizationIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems (IEEE TCAD), 2023
Guojin Chen
Ziyang Yu
Hongduo Liu
Yuzhe Ma
Bei Yu
89
4
0
18 Mar 2023
Physics-Informed Optical Kernel Regression Using Complex-valued Neural
  Fields
Physics-Informed Optical Kernel Regression Using Complex-valued Neural FieldsDesign Automation Conference (DAC), 2023
Guojin Chen
Zehua Pei
Haoyu Yang
Yuzhe Ma
Bei Yu
Martin D. F. Wong
247
18
0
15 Mar 2023
An Adversarial Active Sampling-based Data Augmentation Framework for
  Manufacturable Chip Design
An Adversarial Active Sampling-based Data Augmentation Framework for Manufacturable Chip Design
Mingjie Liu
Haoyu Yang
Zong-Yi Li
K. Sastry
S. Mukhopadhyay
Selim Dogru
Anima Anandkumar
David Z. Pan
Brucek Khailany
Haoxing Ren
226
4
0
27 Oct 2022
Large Scale Mask Optimization Via Convolutional Fourier Neural Operator
  and Litho-Guided Self Training
Large Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training
Haoyu Yang
Zong-Yi Li
K. Sastry
S. Mukhopadhyay
Anima Anandkumar
Brucek Khailany
Vivek Singh
Haoxing Ren
130
11
0
08 Jul 2022
Physics-Informed Neural Operator for Learning Partial Differential
  Equations
Physics-Informed Neural Operator for Learning Partial Differential Equations
Zong-Yi Li
Hongkai Zheng
Nikola B. Kovachki
David Jin
Haoxuan Chen
Burigede Liu
Kamyar Azizzadenesheli
Anima Anandkumar
AI4CE
605
614
0
06 Nov 2021
1
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