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2211.04796
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Physics-separating artificial neural networks for predicting initial
stages of Al sputtering and thin film deposition in Ar plasma discharges

Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges

9 November 2022

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Papers citing "Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges"

2 / 2 papers shown

Machine learning for advancing low-temperature plasma modeling and
simulation

Machine learning for advancing low-temperature plasma modeling and simulation

316

9

0

30 Jun 2023

Physics-separating artificial neural networks for predicting sputtering
and thin film deposition of AlN in Ar/N$_2$ discharges on experimental
timescales

Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N

_2

discharges on experimental timescales

42

5

0

09 Jan 2023

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