ILILT: Implicit Learning of Inverse Lithography Technologies

6 May 2024

Papers citing "ILILT: Implicit Learning of Inverse Lithography Technologies"

6 / 6 papers shown

Title
Deep Physics Prior for First Order Inverse Optimization Haoyu Yang Kamyar Azizzadenesheli Haoxing Ren PINN AI4CE 75 0 0 28 Apr 2025
Intelligent OPC Engineer Assistant for Semiconductor Manufacturing Guojin Chen Haoyu Yang Bei Yu Haoxing Ren 29 0 0 23 Aug 2024
AdaOPC: A Self-Adaptive Mask Optimization Framework For Real Design Patterns Wenqian Zhao Xufeng Yao Ziyang Yu Guojin Chen Yuzhe Ma Bei Yu Martin D. F. Wong 15 17 0 15 Mar 2023
Fourier Neural Operator for Parametric Partial Differential Equations Zong-Yi Li Nikola B. Kovachki Kamyar Azizzadenesheli Burigede Liu K. Bhattacharya Andrew M. Stuart Anima Anandkumar AI4CE 197 2,254 0 18 Oct 2020
Image-to-Image Translation with Conditional Adversarial Networks Phillip Isola Jun-Yan Zhu Tinghui Zhou Alexei A. Efros SSeg 203 19,191 0 21 Nov 2016
U-Net: Convolutional Networks for Biomedical Image Segmentation Olaf Ronneberger Philipp Fischer Thomas Brox SSeg 3DV 229 74,467 0 18 May 2015