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2408.12775
Cited By
Intelligent OPC Engineer Assistant for Semiconductor Manufacturing
23 August 2024
Guojin Chen
Haoyu Yang
Bei Yu
Haoxing Ren
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Papers citing
"Intelligent OPC Engineer Assistant for Semiconductor Manufacturing"
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Title
Large Language Models are Zero-Shot Reasoners
Takeshi Kojima
S. Gu
Machel Reid
Yutaka Matsuo
Yusuke Iwasawa
ReLM
LRM
291
4,048
0
24 May 2022
1
