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2510.02715
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Fully automated inverse co-optimization of templates and block copolymer blending recipes for DSA lithography
3 October 2025
Yuhao Zhou
Huangyan Shen
Qingliang Song
Qingshu Dong
Jianfeng Li
Weihua Li
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"Fully automated inverse co-optimization of templates and block copolymer blending recipes for DSA lithography"
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